Automated Optical Inspection／wafer surface inspection system／YGK Corporation

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【New development】
Wafer surface inspection system for SiC/GaN.
Driving dual laser head for SiC surface particle scanner【YPI-MX-θ DC】

YPI-MX-θ DC can measure not just SiC wafer but also a transparent wafer,Si wafer and LT wafer. Maximum sensitivity is 0.1μｍ PSL.

4inch SiC wafer is measured within 5min. The result measurement includes a latent scratch information.

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LT wafer measurement result example

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Compact・high performance wafer surface inspection system.
The wafer surface particle scanner【YPI-MN】

Transparent substrate is capable measurement 0.3um.

Si wafer is capable measurement 0.15um.

The measurement size is capable until 200mm. (Conditional)

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Compact and high performance AOI 【DF/WF-100】

Suitable to change to automated inspection from manual optical inspection. High speed inspection for defects and particles on the wafer and substrate.

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ＹＰＩ−ＭＸ series（Automated transfer）

Glass substrate/Sapphire wafer surface inspection system
【YPI-MX series（Automated transfer）】

The YPI-MX is specialized transparent glass inspection which can be also applied to a high roughness of back side for various wafers/ substrates.

Isolating surface from back of wafer/substrate with high accuracy by autofocus sensor.

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ＹＰＩ−ＭＸ series（Manual）

Glass substrate/Sapphire wafer surface inspection system
【YPI-MX series（Manul transfer）】

The YPI-MX is specialized transparent glass inspection which can be also applied to a high roughness of back side for various wafers/ substrates.

Isolating surface from back of wafer/substrate with high accuracy by autofocus sensor.

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ＹＰＩ−Ｎ series（Automated transfer）

Wafer surface inspection system
【YPI-N series (Automated transfer)】

The surface particle of the mirror finish substrate (silicon wafer, etc) can be scanned with high speed.

Handling wafer is wide range from 2inch to 8inch.

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ＹＰＩ−Ｎ series（Manual）

Wafer surface inspection system
【YPI-N series (Manual transfer)】

The surface particle of the mirror finish substrate (silicon wafer, etc) can be scanned with high speed.

Handling wafer is wide range from 2inch to 8inch.

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Large glass substrate surface inspection system 【YPI-500】

YPI-500 is able to inspect surface particles for transparent glass substrate and various large size film sheet.  The warpage of center substrate is compensated by autofocus sensor.

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Film sheet inspection system 【YPI-200F】

YPI-200F which is applied to a roll to roll handling of film sheet is capable film sheet surface inspection.

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0.3um detection capability particle sensor 【YPC-03U】

Suitable use inside of semiconductor process and inspection equipment and clean room as stainless body.  Clearly visible LED display is adopted. Quick measurement by easy use operation.

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Full automated transfer prober.

Applied to various alignment mark. Capable for high accuracy probing.

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Ｌｏａｄｅｒ／Ｕｎｌｏａｄｅｒ　ｃｏｎｖｅｙｏｒ　ｓｙｓｔｅｍ

Loader system

The substrates in a magazine rack are transferred automatically to process line equipment.

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Unloader system

The substrates transferred from the process line equipment are stored automatically to magazine rack.

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Ａｅｒｏｓｏｌ　Ｓｏｎｄｅ

Airborne particle counter【Aerosol Sonde】

Airborne particle counter for attaching a hot-air balloon. Measurement aerosol concentration by particle size each.

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Remove electro-static equipment 【Ionizer】

Control maximum ion output by detecting ion output with the unique sensor.

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