Automated Optical Inspection／wafer surface inspection system／YGK Corporation

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【New development】
Wafer surface inspection system for SiC/GaN.
Driving dual laser head for SiC surface particle scanner【YPI-MX-θ DC】

YPI-MX-θ DC can measure not just SiC wafer but also a transparent wafer,Si wafer and LT wafer. Maximum sensitivity is 0.1μｍ PSL.

4inch SiC wafer is measured within 5min. The result measurement includes a latent scratch information.

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LT wafer measurement result example

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Compact・high performance wafer surface inspection system.
The wafer surface particle scanner【YPI-MN】

Transparent substrate is capable measurement 0.3um.

Si wafer is capable measurement 0.15um.

The measurement size is capable until 200mm. (Conditional)

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