Automated Optical Inspection^wafer surface inspection system^YGK Corporation
TEL. +81-55-284-6866
595-2,Kuruwada Minami-Alps,Yamanashi 400-0311,Japan
Loader and Unloader@@
Equipment appearance
Specifications
- Loader
- The loader system can automatically transfer a
substrate stored in magazine ruck to process line.
The loader can handle various substrates, and substrates donft have to alignment store in magazine by adopted center aligner.
Easy use by touch panel monitor. - Unloader
- The unloader can automatically store substrates to
the magazine rack from output of process line in magazine ruck.
The loader can handle various substrates. I/F is equipped for process lines. The substrates are aligned up by aligner function.
ฆ@The system can handle thicker or thin substrates.
@@As the system can set buffer equipment, you can omit the swapping time of cassette.
@@The transfer speed can fit to the process line.
@@The setting can be changed by recipe.
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YGK Corporation
595-2,Kuruwada Minami-Alps,
Yamanashi 400-0311,japan
TEL +81-55-284-6866
FAX +81-55-284-6867