Automated Optical Inspection／wafer surface inspection system／YGK Corporation

　　

Unique accurate balance function

Table ionizer adopted automated balance function.

　　　　　

Accurate balance function

The ionizer can be output proper ion every time by receiving feedback data from dual sensor.

Fan type ＡＣ Ionizer

Fan type pulse ＤＣ Ionizer

Fan type ＤＣ Ionizer

Bar type Ionizer

ＣＳＣＨ　 Ion generator Corona discharge　ＡＬＴ−ＤＣ Generator timing ２０／１０／５／１／０.５／０.２５／０.１２５Ｈｚ Output voltage ±５５００Ｖ Input voltage ＤＣ１２Ｖ（ＡＣ adapter） Panel display Ion balance、Ion output（％） Offset、Alarm，ＣＨ−１／２ Dimension １７７ｘ１１７ｘ７３ｍｍ Weight ０.９３Ｋｇ　（ＣＳＣＨ−１） external output ＲＳ−２３２Ｃ（State output、External control） Ｉ／Ｏ（Alarm output、External control） ＣＳＣＨ−１ ＣＳＢＵ　Bar １ ＣＳＣＨ−２ ＣＳＢＵ−２　Bar ２ ＣＳＢＵ　Specifications ＣＳＢＵ−３００−４Ｅ ３００Ｌ　４ electrode ＣＳＢＵ−６００−８Ｅ ６００Ｌ　８ electrode ＣＳＢＵ−９００−１２Ｅ ９００Ｌ　１２ electrode ＣＳＢＵ−１２００−１６Ｅ １２００Ｌ　１６ electrode ＣＳＢＵ−１５００−２０Ｅ １５００Ｌ　２０electrode ＣＳＢＵ−１８００−２４Ｅ １８００Ｌ　２４ electrode