Automated Optical Inspection／wafer surface inspection system／YGK Corporation

Suitable to alter OM manual inspection to automated.

Can inspect both surface and back of glass substrate at once. Display defects surface or back of glass each.

Specifications

Substrate size

２００ｍｍ×２００ｍｍ

Inspection time

Approx. 1min 30sec 100mm square
（3um detection sensitivity）

Load work piece

Manual with sucking vacuum

Dimension

Ｗ８００ｍｍ×Ｄ８００ｍｍ×Ｈ１,７１０ｍｍ

Maximum resolution

０.８７μｍ

Target substrate

Wafer、Glass、substrate
（non-pattern or grid pattern）

Review function

Available