Glass substrate polishing inspection system
XGS
Wafer polishing
Wafer surface particle scanner
YPI-MX
Opaque wafer
Wafer surface particle scanner
YPI-MX（semi-automatic）
Opaque wafer
Wafer surface particle scanner
YPI-MX FOUP
Opaque wafer
Wafer surface particle scanner
YPI-MN（semi-automatic）
Opaque wafer
Dicing (Tape frame) Wafer Surface Inspection System
YPI-MX TF
Tape frame wafer
Tape frame wafer surface particle scanner
YPI-MX TF FOUP
Tape frame wafer
Transparent wafer surface particle scanner
YPI-MX
Transparent wafer
Transparent wafer surface particle scanner
YPI-MX（semi-automatic）
Transparent wafer
Transparent wafer surface particle scanner
YPI-MX FOUP
Transparent wafer
Transparent wafer surface particle scanner
YPI-MN（semi-automatic）
Transparent wafer
SiC/GaN wafer surface particle scanner
YPI-MX DC
Silicon carbide and gallium nitride wafers
SiC/GaN wafer surface particle scanner
YPI-MX DC（semi-automatic）
Silicon carbide and gallium nitride wafers
SiC/GaN wafer surface particle scanner
YPI-MX DC SMIF
Silicon carbide and gallium nitride wafers
Pellicle film particle scanner
YPI-MX P
Pellicle film