Wafer surface particle scanner
YPI-MX FOUP
Laser inspection system for unpatterned wafer.
For process monitor.
For wafer cleaning process.
12inch wafers
Spec
| Model | YPI-MX FOUP |
|---|---|
| Loading type | Auto loading with FOUP opener |
| Dimension | (W)2145 x (D)1340 x (H)1860mm |
| Utility (Power) | AC200V |
| Utility (Vacuum) | -70kPa -40kPa |
| Utility (Compressed air) | 0.6MPa |
| Wafer type | Silicon, filmed wafer |
| Wafer size | 12inch |