SiC/GaN wafer surface particle scanner
YPI-MX DC
Laser inspection system for unpatterned SiC/GaN wafer.
For process monitor.
For wafer cleaning process.
Spec
| Model | YPI-MX DC |
|---|---|
| Loading type | Auto loading |
| Dimension | (W)1480 x (D)1220 x (H)1810mm |
| Utility (Power) | AC200V |
| Utility (Vacuum) | -70kPa -40kPa |
| Utility (Compressed air) | 0.3MPa |
| Wafer type | Silicon, Silicon carbide, Gallium Nitride |
| Wafer size | 2-8inch |