Glass substrate polishing inspection system
XGS
Inspection device for confirming polishing of glass substrates.
You can check the polishing performance through comparative inspection.
Spec
| Model | XGS |
|---|---|
| Loading type | |
| Dimension | |
| Utility (Power) | |
| Utility (Vacuum) | |
| Utility (Compressed air) | |
| Wafer size |