Wafer surface particle scanner
YPI-MX
Laser inspection system for unpatterned wafer.
For process monitor.
For wafer cleaning process.
For mass-production.
Spec
| Model | YPI-MX |
|---|---|
| Loading type | Auto loading |
| Dimension | (W)1480 x (D)1220 x (H)1810mm |
| Utility (Power) | AC200V |
| Utility (Vacuum) | -70kPa -40kPa |
| Wafer type | Silicon, filmed wafer, GaAs, InP |
| Wafer size | 2-8inch |