Automated Optical Inspection／wafer surface inspection system／YGK Corporation

　

By recheck the components, the dimension will be smaller than conventional one.
Suitable attachment to air balloon with reasonable price.
The data can send with radio transmission with optional Rawinsonde.

Specifications

Light Source

LD（wavelength 780）

Rawinsonde

ＲＳ０６Ｇ　Serial transmission

Weight

８００ｇ

Dimension

Ｗ２０２×Ｄ１６０×Ｈ１７０(ｍｍ)

Power supply

Size AA lithium battery 12 pces（ＤＣ１８Ｖ）

Air flow

Sample air　３Ｌ／ｍｉｎ
Purge air　　１００ｍＬ／ｍｉｎ

Pump

Gear pump

Particle Bin

※Default setting（１０channels）
０.３ ０.４ ０.５ ０.８ １.２ ２.０ ３.４ ５.０ ７.０ １０.０μｍ

Control air flow

Pump current control from atmospheric sensor.