Automated Optical Inspection／wafer surface inspection system／YGK Corporation

　　　　　　　　　　　

Inspection system for large glass substrate
Can inspect surface particles for large size glass substrate and film sheet.
Apply to warpage for sample center position with auto focus sensor unit.

Specifications

Work piece size

Maximum５００×５００(ｍｍ)

Scanning method

XY scanning

Inspection time

Square shape of 500mm is approx. 25min

Work piece setting

Manual

Dimension

Ｗ１,１５０×Ｄ１,１００×Ｈ１,１３５(ｍｍ)

Weight

Approx.５００ｋｇ

Power Consumption

Approx.１.５ｋＷ（１００Ｖ）

Maximum sensitivity

0.5um on transparent substrate

Target substrate

Transparent substrate, Filmed transparent substrate, film sheet. Surface isolated detection sensor can be attached as option.