Automated Optical Inspection／wafer surface inspection system／YGK Corporation

　　　　　　　　　　　　　　

Inspection system for film sheet which can be applied to roll to roll.

Specifications

Work piece size

Till 300mm width of film sheet

Scanning method

Sensor scans the film by X stage

Inspection time

２００ｍｍ／ｓｅｃ

Work piece setting

Auto transfer with roll to roll

Weight

Approx.１００ｋｇ

Power Consumption

Approx.１.５ｋＷ（１００Ｖ）

Maximum sensitivity

０.５μｍ

Target substrate

Transparent film sheet